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Introduction
The Cleanroom Reference Guide for Semiconductor and MEMS Applications combines all of the essential information to design, build and operate a cleanroom into one easy to access concise guide. The guide is focused mainly on semiconductor and MEMS applications but is also useful for people in other fields.

Published
March 2008
Number of pages
109
Number of figures
122
Number of tables
61

Who should buy this product  

This product is designed to serve the needs of anyone who is interested in understanding the cleanrooms. Do you:
Manage an IC manufacturing operation and want to benchmark your company against others?

If you answered yes to any of the questions above, then this product is for you.

Chapter list
Chapter 1 - Welcome and License
Chapter 2 - Particle Contamination Control
Chapter 3 - Molecular Contamination Control
Chapter 4 - Heating, Ventilating and Air Conditioning (HVAC)
Chapter 5 - Vibration and Noise
Chapter 6 - Electromagnetic Interference (EMI) and Electrostatic Discharge (ESD)
Chapter 7 - Ultrapure Water
Chapter 8 - Ultrapure Gases
Chapter 9 - Ultrapure Chemicals
Chapter 10 - Waste Water Treatment
Chapter 11 - Exhaust Abatement
Chapter 12 - Other Utilities

Cost and how to buy
Pricing
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Cleanroom Reference Guide