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Introduction
The Cleanroom Reference Guide for Semiconductor and MEMS Applications combines all of the essential information to design, build and operate a cleanroom into one easy to access concise guide. The guide is focused mainly on semiconductor and MEMS applications but is also useful for people in other fields.
| Published |
March 2008
|
| Number of pages |
109
|
| Number of figures |
122
|
| Number of tables |
61
|
This product is designed to serve the needs of anyone who is interested in understanding the cleanrooms. Do you:
Manage an IC manufacturing operation and want to benchmark your company against others?
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