IC Knowledge - Fundamental Principles of Integrated Circuit Fabrication

Fundamental Principles of Integrated Circuit Fabrication

Introduction
In 2000 we were developing a highly technical text book entitled "Fundamenatl Principles of Integrated Circuit Fabrication". We ultimately decided there wasn't a big enough market to complete the book. Posted here for our web site visitors use are the completed and mostly completed chapters.

Chapter list

Chapter 1 - Properties of Silicon - complete chapter
Chapter 2 - An Overview of Semiconductor Technology - complete chapter
Chapter 3 - Pre Thermal or Deposition Process: Wafer Cleaning - partial chapter to be posted
Chapter 4 - Thermal Oxidation and Nitridation of Silicon and Silicon Dioxide - partial chapter to be posted
Chapter 5 - Photolithography - complete chapter
Chapter 6 - Etching and Stripping - not written
Chapter 7 - Diffusion in Silicon - complete chapter - updated April 25, 2008
Chapter 8 - Ion Implantation and Annealing - not written
Chapter 9 - Silicon, Polysilicon and Dielectric Deposition - not written
Chapter 10 - Metal Deposition - not written
Chapter 11 - Chemical Mechanical Planarization - not written

For a complete up-to-date treatement of Integrated Circuit Technology including teh latest process flows we recommend our IC Technology Report.