130nm Linewidth, 30,000 - 300mm wafers-out per month Fabs running at 90% of capacity. Logic wafer cost for 6 layer copper interconnect is $3,367.25/wafer, DRAM wafer cost for a high-k capacitor process is $2,505.38/wafer. See figures 1 and 2. Source IC Knowledge 2001 IC Cost Model.
Figure 1. 300mm logic wafer cost breakout.
Figure 2. 300mm DRAM wafer cost breakout.
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